High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology

We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm. [DOI: 10.2971/jeos.2010.10035s]